SCL3300‑D01 | Murata | Industrial‑Grade 3‑Axis MEMS Inclinometer | 3‑Axis Accelerometer

Built on Murata’s capacitive 3D‑MEMS technology with integrated ASIC signal‑processing chip. **Tilt angles are calculated directly inside the sensor, eliminating complex algorithm implementation on the MCU**. Four software‑configurable measurement modes are supported. Wide operating temperature range: −40 ℃ ~ +125 ℃. 12‑pin pre‑molded SMD package with hardware BIST self‑diagnosis. Optimized for high‑precision static and quasi‑static tilt measurement, widely used for industrial inclination sensing and structural health monitoring.

### Key Specifications

‑ Measurement axes: X / Y / Z 3‑axis

‑ Measurement range modes (software‑selectable)

‑ Mode 1: ±1.2 g / ±90°, 40 Hz low‑pass filter

‑ Mode 2: ±2.4 g / ±90°, 70 Hz low‑pass filter

‑ Mode 3 / 4: Inclinometer‑special mode ±10°, 10 Hz low‑pass filter (highest resolution)

‑ Angular resolution: 0.0055°/LSB

‑ Noise density: as low as **0.001°/√Hz** (industry‑leading low value for detection of tiny tilts)

‑ Temperature offset performance: ±0.005°/℃

‑ Output Data Rate (ODR): up to 2000 Hz

‑ Supply voltage: 3.0‑3.6 V; typical operating current: 1.2 mA

‑ Communication interface: SPI digital interface

‑ Operating temperature: −40 ℃ ~ +125 ℃ (industrial wide‑temperature range)

‑ Package: DFL‑12 (12‑pin); dimensions 8.6 × 7.6 × 3.3 mm

‑ Self‑diagnosis: Built‑in hardware BIST

 Main Functions

1. Collect 3‑axis gravitational acceleration; **tilt angle data is output directly from the sensor**, significantly reducing algorithm workload for the MCU.

2. Four filter / range modes switchable via software, supporting both large‑angle measurement and ultra‑high‑precision small‑angle measurement.

3. Excellent long‑term zero‑point stability. Minimal drift after factory calibration, which reduces on‑site recalibration frequency.

4. Hardware BIST self‑diagnosis detects and reports sensor faults to improve system reliability.

5. High‑speed SPI digital output; no external ADC required, simplifying peripheral PCB circuitry.

6. Superior vibration‑damping performance to deliver stable tilt output under industrial vibration conditions.

Application Scope

1. **Structural Health Monitoring (SHM, primary application)**: deformation and tilt monitoring for bridges, dams, wind‑turbine towers, buildings and tower cranes.

2. Construction machinery & aerial work platforms: leveling control, tilt alarm and safety attitude monitoring.

3. Surveying levels, laser land‑leveling equipment, inclinometers and foundation‑pit slope monitoring sensors.

4. Industrial equipment attitude control and base‑level detection for robots.

5. Industrial Inertial Measurement Unit (IMU); combined with gyroscopes to construct 6‑axis inertial assemblies.

6. Auxiliary attitude sensing for positioning and navigation systems.

 Model Comparison

‑ SCL3300‑D01: Standard variant. Compared with SCA3400‑D01: SCA3400‑D01 outputs raw acceleration data, while SCL3300‑D01 outputs computed tilt angles internally and is better suited for inclinometer projects.